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40
Sessions

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Course Description

Very-large-scale integration (VLSI) is the process of creating an integrated circuit (IC) by combining thousands of transistors into a single chip.

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Course Syllabus
  • Lecture - 1 Introduction on VLSI Design
  • Lecture - 2 Bipolar Junction Transistor Fabrication
  • Lecture - 3 MOSFET Fabrication for IC
  • Lecture - 4 Crystal Structure of Si
  • Lecture - 5 Crystal Structure contd
  • Lecture - 6 Defects in Crystal + Crystal growth
  • Lecture - 7 Crystal growth Contd + Epitaxy I
  • Lecture - 8 Epitaxy II - Vapour phase Epitaxy
  • Lecture - 9 Epitaxy III - Doping during Epitaxy
  • Lecture - 10 Molecular beam Epitaxy
  • Lecture - 11 Oxidation I - Kinetics of Oxidation
  • Lecture - 12 Oxidation II Oxidation rate constants
  • Lecture - 13 Oxidation III - Dopant Redistribution
  • Lecture - 14 Oxidation IV - Oxide Charges
  • Lecture - 15 Diffusion I - Theory of Diffusion
  • Lecture - 16 Diffusion II - Infinite Source
  • Lecture - 17 Diffusion III - Actual Doping Profiles
  • Lecture - 18 Diffusion IV Diffusion Systems
  • Lecture - 19 Ion - Implantation Process
  • Lecture - 20 Ion - Implantation Process
  • Lecture - 21 Annealing of Damages
  • Lecture - 22 Masking during Implantation
  • Lecture - 23 Lithography - I
  • Lecture - 24 Lithography - II
  • Lecture - 25 Wet Chemical Etching
  • Lecture - 26 Dry Etching
  • Lecture - 27 Plasma Etching Systems
  • Lecture - 28 Etching of Si,Sio2,SiN and other materials
  • Lecture - 29 Plasma Deposition Process
  • Lecture - 30 Metalization - I
  • Lecture - 31 Problems in Aluminium Metal contacts
  • Lecture - 32 IC BJT - From junction isolation to LOCOS
  • Lecture - 33 Problems in LOCOS + Trench isolation
  • Lecture - 34 More about BJT Fabrication and Realization
  • Lecture - 35 Circuits + Transistors in ECL Circuits
  • Lecture - 36 MOSFET I - Metal gate vs Self-aligned Poly-gate
  • Lecture - 37 MOSFET II Tailoring of Device Parameters
  • Lecture - 38 CMOS Technology
  • Lecture - 39 Latch - up in CMOS
  • Lecture - 40 BICMOS Technology
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