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32
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Course Description

Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).

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Course Syllabus
  • Lecture - 1 Introduction to MEMS & Microsystems
  • Lecture - 2 Introduction to Microsensors
  • Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey
  • Lecture - 4 Application of MEMS
  • Lecture - 5 MEMS Materials
  • Lecture - 6 MEMS Materials' Properties
  • Lecture - 7 MEMS Materials Properties (Contd.)
  • Lecture - 8 Microelectronic Technology for MEMS - II
  • Lecture - 9 Microelectronic Technology for MEMS - III
  • Lecture - 10 Micromachining Technology for MEMS
  • Lecture - 11 Micromachining Process
  • Lecture - 12 Etch Stop Techniques and Microstructure
  • Lecture - 13 Surface and Quartz Micromachining
  • Lecture - 14 Fabrication of Micromachined Microstructure
  • Lecture - 15 Microstereolithography
  • Lecture - 16 MEMS Microsensors Thermal
  • Lecture - 17 Micromachined Microsensors Mechanical
  • Lecture - 18 MEMS Pressure and Flow Sensor
  • Lecture - 19 Micromachined Flow Sensors
  • Lecture - 20 MEMS Inertial Sensors
  • Lecture - 21 Micromachined Microaccelerometers for MEMS
  • Lecture - 22 MEMS Accelerometers for Avionics
  • Lecture - 23 Temperature Drift and Damping Analysis
  • Lecture - 24 Piezoresistive Accelerometer Technology
  • Lecture - 25 MEMS Capacitive Accelerometer
  • Lecture - 26 MEMS Capacitive Accelerometer Process
  • Lecture - 27 MEMS Gyro Sensor
  • Lecture - 28 MEMS for Space Application
  • Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT
  • Lecture - 30 Wafer Bonding & Packaging of MEMS
  • Lecture - 31 Interface Electronics for MEMS
  • Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS)
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